An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization

• Santiago H. Andany,
• Gregor Hlawacek,
• Stefan Hummel,
• Charlène Brillard,
• Mustafa Kangül and
• Georg E. Fantner

Beilstein J. Nanotechnol. 2020, 11, 1272–1279, doi:10.3762/bjnano.11.111

• integration. Keywords: atomic force microscopy (AFM); combined setup; correlative microscopy; helium ion microscopy (HIM); self-sensing cantilevers; Introduction Shortly after the invention of the atomic force microscope (AFM) in 1986 [1], efforts were made towards combining this scanning probe microscopy

• measurements were taken using silicon piezo-resistive self-sensing cantilevers (PRS-L100-F400-SCD-PCB SCL-SensorTech Fabrication GMBH, Vienna, Austria) with a spring constant of ca. 100 N/m, and a footprint of 110 × 48 µm. Imaging gains on the custom-made controller were adjusted as high as possible before

Charged particle single nanometre manufacturing

• Philip D. Prewett,
• Cornelis W. Hagen,
• Claudia Lenk,
• Steve Lenk,
• Marcus Kaestner,
• Tzvetan Ivanov,
• Ahmad Ahmad,
• Ivo W. Rangelow,
• Xiaoqing Shi,
• Stuart A. Boden,
• Alex P. G. Robinson,
• Dongxu Yang,
• Sangeetha Hari,
• Marijke Scotuzzi and
• Ejaz Huq

Beilstein J. Nanotechnol. 2018, 9, 2855–2882, doi:10.3762/bjnano.9.266